Surface Science Facility (SSF)
The Surface Science Facility houses a cluster of instruments for non-destructive characterizations of spectroscopic and structural properties of surfaces and interfaces of materials and devices.
The Kratos AXIS-Supra is a high-performance multi-technique instrument providing a broad combination of surface-sensitive spectroscopic and microscopic characterization methods under Ultra-High Vacuum (UHV): high-sensitivity X-ray photoelectron spectroscopy and microscopy (XPS and XPS imaging), high-resolution scanning field emission Auger spectroscopy and microscopy (SEM, SAM, AES), ultraviolet photoelectron spectroscopy (UPS), and ion scattering spectroscopy (ISS).
The Polytec Micro System Analyzer (MSA-500) is used for ambient non-contact and non-destructive measurement of three-dimensional movements in microsystems and devices. The out-of-plane movement is measured using the Polytec Microscope Scanning Vibrometer (PSV), in-plane movement with the Planar Motion Analyzer (PMA), and 3D topography measurements are performed with the Topography Measurement System (TMS) to acquire the surface geometry of rough and also reflective structures.
